@misc{indiciae7d7bfb433df8,
  title = {The role of substrate bias and nitrogen doping on the structural evolution and local elastic modulus of diamond-like carbon films},
  author = {S. R. Polaki and K. Ganesan and S. K. Srivastava and M. Kamruddin and A. K. Tyagi},
  year = {2017},
  doi = {10.1088/1361-6463/aa6492},
  url = {https://arxiv.org/abs/1703.08990},
  note = {Source identifier: 1703.08990}
}