TY  - RPRT
TI  - The role of substrate bias and nitrogen doping on the structural evolution and local elastic modulus of diamond-like carbon films
AU  - S. R. Polaki
AU  - K. Ganesan
AU  - S. K. Srivastava
AU  - M. Kamruddin
AU  - A. K. Tyagi
PY  - 2017
DO  - 10.1088/1361-6463/aa6492
UR  - https://arxiv.org/abs/1703.08990
ID  - 1703.08990
ER  -