@misc{indiciaeca0453c5fe5d, title = {Determination of the p-spray profile for n+p silicon sensors using a MOSFET}, author = {E. Fretwurst and E. Garutti and R. Klanner and I. Kopsalis and J. Schwandt and M. Weberpals}, year = {2017}, doi = {10.1016/j.nima.2017.05.046}, url = {https://arxiv.org/abs/1704.01829}, note = {Source identifier: 1704.01829} }