@misc{indiciae342f834fd384, title = {Thermoelectric bolometers based on ultra-thin heavily doped single-crystal silicon membranes}, author = {Andrey V. Timofeev and Aapo Varpula and Andrey Shchepetov and Kestutis Grigoras and Juha Hassel and Jouni Ahopelto and Markku Ylilammi and Mika Prunnila}, year = {2017}, doi = {10.1063/1.4989683}, url = {https://arxiv.org/abs/1704.02511}, note = {Source identifier: 1704.02511} }