TY  - RPRT
TI  - Thermoelectric bolometers based on ultra-thin heavily doped single-crystal silicon membranes
AU  - Andrey V. Timofeev
AU  - Aapo Varpula
AU  - Andrey Shchepetov
AU  - Kestutis Grigoras
AU  - Juha Hassel
AU  - Jouni Ahopelto
AU  - Markku Ylilammi
AU  - Mika Prunnila
PY  - 2017
DO  - 10.1063/1.4989683
UR  - https://arxiv.org/abs/1704.02511
ID  - 1704.02511
ER  -