@misc{indiciaeb77c5e2a9202,
  title = {Analysis of a Sputtered Si Surface for Ar Sputter Gas Supply Purity Monitoring},
  author = {Uwe Scheithauer},
  year = {2017},
  url = {https://arxiv.org/abs/1704.03051},
  note = {Source identifier: 1704.03051}
}