@misc{indiciaeabe310fe7e76,
  title = {Developments Toward a 250-nm, Fully Planarized Fabrication Process With Ten Superconducting Layers And Self-Shunted Josephson Junctions},
  author = {Sergey K. Tolpygo and Vladimir Bolkhovsky and Ravi Rastogi and Scott Zarr and Alexandra L. Day and Terence J. Weir and Alex Wynn and Leonard M. Johnson},
  year = {2017},
  doi = {10.1109/isec.2017.8314189},
  url = {https://arxiv.org/abs/1704.07683},
  note = {Source identifier: 1704.07683}
}