TY  - RPRT
TI  - Developments Toward a 250-nm, Fully Planarized Fabrication Process With Ten Superconducting Layers And Self-Shunted Josephson Junctions
AU  - Sergey K. Tolpygo
AU  - Vladimir Bolkhovsky
AU  - Ravi Rastogi
AU  - Scott Zarr
AU  - Alexandra L. Day
AU  - Terence J. Weir
AU  - Alex Wynn
AU  - Leonard M. Johnson
PY  - 2017
DO  - 10.1109/isec.2017.8314189
UR  - https://arxiv.org/abs/1704.07683
ID  - 1704.07683
ER  -