@misc{indiciaead41a2c8225a, title = {Reconstructing Detailed Line Profiles of Lamellar Gratings from GISAXS Patterns with a Maxwell Solver}, author = {Victor Soltwisch and Analia Fernandez Herrero and Mika Pflüger and Anton Haase and Jürgen Probst and Christian Laubis and Michael Krumrey and Frank Scholze}, year = {2017}, doi = {10.1107/s1600576717012742}, url = {https://arxiv.org/abs/1704.08032}, note = {Source identifier: 1704.08032} }