TY  - RPRT
TI  - Reconstructing Detailed Line Profiles of Lamellar Gratings from GISAXS Patterns with a Maxwell Solver
AU  - Victor Soltwisch
AU  - Analia Fernandez Herrero
AU  - Mika Pflüger
AU  - Anton Haase
AU  - Jürgen Probst
AU  - Christian Laubis
AU  - Michael Krumrey
AU  - Frank Scholze
PY  - 2017
DO  - 10.1107/s1600576717012742
UR  - https://arxiv.org/abs/1704.08032
ID  - 1704.08032
ER  -