@misc{indiciae1cd1a0b7ee77,
  title = {Highly hydrogen-sensitive thermal desorption spectroscopy system for quantitative analysis of low hydrogen concentration (\textasciitilde{}1 x 10\textasciicircum{}16 atoms/cm3) in thin-film samples},
  author = {Taku Hanna and Hidenori Hiramatsu and Isao Sakaguchi and Hideo Hosono},
  year = {2017},
  doi = {10.1063/1.4982255},
  url = {https://arxiv.org/abs/1705.02207},
  note = {Source identifier: 1705.02207}
}