TY  - RPRT
TI  - Highly hydrogen-sensitive thermal desorption spectroscopy system for quantitative analysis of low hydrogen concentration (~1 x 10^16 atoms/cm3) in thin-film samples
AU  - Taku Hanna
AU  - Hidenori Hiramatsu
AU  - Isao Sakaguchi
AU  - Hideo Hosono
PY  - 2017
DO  - 10.1063/1.4982255
UR  - https://arxiv.org/abs/1705.02207
ID  - 1705.02207
ER  -