@misc{indiciaed12cf90b0e65, title = {Thermocompression Bonding Technology for Multilayer Superconducting Quantum Circuits}, author = {C. R. H. McRae and J. H. Béjanin and Z. Pagel and A. O. Abdallah and T. G. McConkey and C. T. Earnest and J. R. Rinehart and M. Mariantoni}, year = {2017}, doi = {10.1063/1.5003169}, url = {https://arxiv.org/abs/1705.02435}, note = {Source identifier: 1705.02435} }