@misc{indiciae8f73f33d32ce,
  title = {Structural, Chemical and Optical Properties of Cerium Dioxide Film Prepared by Atomic Layer Deposition on TiN and Si Substrates},
  author = {S. Vangelista and R. Piagge and S. Ek and T. Sarnet and G. Ghidini and C. Martella and A. Lamperti},
  year = {2017},
  doi = {10.1016/j.tsf.2017.05.034},
  url = {https://arxiv.org/abs/1705.04071},
  note = {Source identifier: 1705.04071}
}