TY  - RPRT
TI  - Structural, Chemical and Optical Properties of Cerium Dioxide Film Prepared by Atomic Layer Deposition on TiN and Si Substrates
AU  - S. Vangelista
AU  - R. Piagge
AU  - S. Ek
AU  - T. Sarnet
AU  - G. Ghidini
AU  - C. Martella
AU  - A. Lamperti
PY  - 2017
DO  - 10.1016/j.tsf.2017.05.034
UR  - https://arxiv.org/abs/1705.04071
ID  - 1705.04071
ER  -