@misc{indiciae989d511ccf9e,
  title = {A self-aligned nano-fabrication process for vertical NbN-MgO-NbN Josephson junctions},
  author = {A. Grimm and S. Jebari and D. Hazra and F. Blanchet and F. Gustavo and J. -L. Thomassin and M. Hofheinz},
  year = {2017},
  doi = {10.1088/1361-6668/aa8007},
  url = {https://arxiv.org/abs/1705.05608},
  note = {Source identifier: 1705.05608}
}