@misc{indiciaec3fa5846a415,
  title = {Spectroscopic Ellipsometry investigation on anisotropic optical properties of sputtered AlN films},
  author = {Padmalochan Panda and R. Ramaseshan and S. Tripura Sundari and H. Suematsu},
  year = {2018},
  url = {https://arxiv.org/abs/1705.07729},
  note = {Source identifier: 1705.07729}
}