TY  - RPRT
TI  - Spectroscopic Ellipsometry investigation on anisotropic optical properties of sputtered AlN films
AU  - Padmalochan Panda
AU  - R. Ramaseshan
AU  - S. Tripura Sundari
AU  - H. Suematsu
PY  - 2018
UR  - https://arxiv.org/abs/1705.07729
ID  - 1705.07729
ER  -