@misc{indiciaeea5101528b5c,
  title = {Atomic Layer deposition of 2D and 3D standards for quantitative synchrotron-based composition and structural analysis methods},
  author = {Nicholas G. Becker and Anna Butterworth and Andrey Sokolov and Muriel Salome and Steven Sutton and De Andrade Vincent and Andrew Westphal and Thomas Proslier},
  year = {2017},
  url = {https://arxiv.org/abs/1705.08403},
  note = {Source identifier: 1705.08403}
}