TY - RPRT TI - Atomic Layer deposition of 2D and 3D standards for quantitative synchrotron-based composition and structural analysis methods AU - Nicholas G. Becker AU - Anna Butterworth AU - Andrey Sokolov AU - Muriel Salome AU - Steven Sutton AU - De Andrade Vincent AU - Andrew Westphal AU - Thomas Proslier PY - 2017 UR - https://arxiv.org/abs/1705.08403 ID - 1705.08403 ER -