@misc{indiciae7f0df002794a,
  title = {Atomic Layer Deposition of Cerium Dioxide Film on TiN and Si Substrates: Structural and Chemical Properties},
  author = {Silvia Vangelista and Rossella Piagge and Satu Ek and Tiina Sarnet and Gabriella Ghidini and Alessio Lamperti},
  year = {2017},
  url = {https://arxiv.org/abs/1706.00340},
  note = {Source identifier: 1706.00340}
}