TY  - RPRT
TI  - Atomic Layer Deposition of Cerium Dioxide Film on TiN and Si Substrates: Structural and Chemical Properties
AU  - Silvia Vangelista
AU  - Rossella Piagge
AU  - Satu Ek
AU  - Tiina Sarnet
AU  - Gabriella Ghidini
AU  - Alessio Lamperti
PY  - 2017
UR  - https://arxiv.org/abs/1706.00340
ID  - 1706.00340
ER  -