@misc{indiciaeb5f94af69bf4, title = {Enhancement of superconductivity in NbN nanowires by negative electron-beam lithography with positive resist}, author = {I. Charaev and T. Silbernagel and B. Bachowsky and A. Kuzmin and S. Doerner and K. Ilin and A. Semenov and D. Roditchev and D. Yu. Vodolazov and M. Siegel}, year = {2017}, doi = {10.1063/1.4986416}, url = {https://arxiv.org/abs/1706.01289}, note = {Source identifier: 1706.01289} }