@misc{indiciaeca3975e69207, title = {Correlated evolution of structure and mechanical loss of a sputtered silica film}, author = {Massimo Granata and Elodie Coillet and Valérie Martinez and Vincent Dolique and Alex Amato and Maurizio Canepa and Jérémie Margueritat and Christine Martinet and Alain Mermet and Christophe Michel and Laurent Pinard and Benoît Sassolas and Gianpietro Cagnoli}, year = {2017}, doi = {10.1103/physrevmaterials.2.053607}, url = {https://arxiv.org/abs/1706.02928}, note = {Source identifier: 1706.02928} }