@misc{indiciaef87d0d56a7b1,
  title = {Effect of oxygen plasma on nanomechanical silicon nitride resonators},
  author = {Niklas Luhmann and Artur Jachimowicz and Johannes Schalko and Pedram Sadeghi and Markus Sauer and Annette Foelske-Schmitz and Silvan Schmid},
  year = {2017},
  doi = {10.1063/1.4989775},
  url = {https://arxiv.org/abs/1706.02957},
  note = {Source identifier: 1706.02957}
}