@misc{indiciae31854ea96a5f, title = {3D integrated superconducting qubits}, author = {D. Rosenberg and D. Kim and R. Das and D. Yost and S. Gustavsson and D. Hover and P. Krantz and A. Melville and L. Racz and G. O. Samach and S. J. Weber and F. Yan and J. Yoder and A. J. Kerman and W. D. Oliver}, year = {2017}, doi = {10.1038/s41534-017-0044-0}, url = {https://arxiv.org/abs/1706.04116}, note = {Source identifier: 1706.04116} }