@misc{indiciae334f51b8f087,
  title = {Side-wall spacer passivated sub-um Josephson junction fabrication process},
  author = {Leif Grönberg and Mikko Kiviranta and Visa Vesterinen and Janne Lehtinen and Slawomir Simbierowicz and Juho Luomahaara and Mika Prunnila and Juha Hassel},
  year = {2018},
  doi = {10.1088/1361-6668/aa9411},
  url = {https://arxiv.org/abs/1706.06397},
  note = {Source identifier: 1706.06397}
}