@misc{indiciaec6525d882ee0,
  title = {An argon ion beam milling process for native \$\textbackslash{}text\{AlO\}\_\textbackslash{}text\{x\}\$ layers enabling coherent superconducting contacts},
  author = {Lukas Grünhaupt and Uwe von Lüpke and Daria Gusenkova and Sebastian T. Skacel and Nataliya Maleeva and Steffen Schlör and Alexander Bilmes and Hannes Rotzinger and Alexey V. Ustinov and Martin Weides and Ioan M. Pop},
  year = {2017},
  doi = {10.1063/1.4990491},
  url = {https://arxiv.org/abs/1706.06424},
  note = {Source identifier: 1706.06424}
}