@misc{indiciae732c1c8ea834,
  title = {Scanning Microwave Microscopy of Aluminum CMOS Interconnect Lines Buried in Oxide and Water},
  author = {Xin Jin and Kuanchen Xiong and Roderick Marstell and Nicholas C. Strandwitz and James C. M. Hwang and Marco Farina and Alexander Göritz and Matthias Wietstruck and Mehmet Kaynak},
  year = {2017},
  url = {https://arxiv.org/abs/1706.07538},
  note = {Source identifier: 1706.07538}
}