TY  - RPRT
TI  - Scanning Microwave Microscopy of Aluminum CMOS Interconnect Lines Buried in Oxide and Water
AU  - Xin Jin
AU  - Kuanchen Xiong
AU  - Roderick Marstell
AU  - Nicholas C. Strandwitz
AU  - James C. M. Hwang
AU  - Marco Farina
AU  - Alexander Göritz
AU  - Matthias Wietstruck
AU  - Mehmet Kaynak
PY  - 2017
UR  - https://arxiv.org/abs/1706.07538
ID  - 1706.07538
ER  -