TY  - RPRT
TI  - Ab-initio Study of the Trimethylaluminum Atomic Layer Deposition Process on Carbon Nanotubes - An Alternative Initial Step
AU  - A. Förster
AU  - C. Wagner
AU  - J. Schuster
AU  - J. Friedrich
PY  - 2017
DO  - 10.1116/1.4968196
UR  - https://arxiv.org/abs/1706.10056
ID  - 1706.10056
ER  -