@misc{indiciae19e098f39e66,
  title = {Theoretical investigation of in situ k-restore processes for damaged ultra-low-k dielectrics},
  author = {A. Förster and C. Wagner and J. Schuster and S. Gemming},
  year = {2017},
  doi = {10.1016/j.mee.2015.12.012},
  url = {https://arxiv.org/abs/1706.10064},
  note = {Source identifier: 1706.10064}
}