TY  - RPRT
TI  - Theoretical investigation of in situ k-restore processes for damaged ultra-low-k dielectrics
AU  - A. Förster
AU  - C. Wagner
AU  - J. Schuster
AU  - S. Gemming
PY  - 2017
DO  - 10.1016/j.mee.2015.12.012
UR  - https://arxiv.org/abs/1706.10064
ID  - 1706.10064
ER  -