@misc{indiciae4023211dc86b,
  title = {Theoretical investigation of an in situ k-restore process for damaged ultra-low-k materials based on plasma enhanced fragmentation},
  author = {A. Förster and C. Wagner and S. Gemming and J. Schuster},
  year = {2017},
  doi = {10.1116/1.4927564},
  url = {https://arxiv.org/abs/1706.10065},
  note = {Source identifier: 1706.10065}
}