TY  - RPRT
TI  - Theoretical investigation of an in situ k-restore process for damaged ultra-low-k materials based on plasma enhanced fragmentation
AU  - A. Förster
AU  - C. Wagner
AU  - S. Gemming
AU  - J. Schuster
PY  - 2017
DO  - 10.1116/1.4927564
UR  - https://arxiv.org/abs/1706.10065
ID  - 1706.10065
ER  -