@misc{indiciae433cb677e156,
  title = {Si Orientation Dependent Release of SiO2 Microcantilevers by Wet Chemical Etching Method},
  author = {Sagnik Middya and K. Prabakar},
  year = {2017},
  url = {https://arxiv.org/abs/1706.10126},
  note = {Source identifier: 1706.10126}
}