@misc{indiciaea7ba51c9e518,
  title = {Hydrogen loss and its improved retention in hydrogen plasma treated a-SiNx:H films: ERDA study with 100 MeV Ag7+ ions},
  author = {R. K. Bommali and S. Ghosh and S. A. Khan and P. Srivastava},
  year = {2017},
  doi = {10.1016/j.nimb.2018.03.005},
  url = {https://arxiv.org/abs/1707.03554},
  note = {Source identifier: 1707.03554}
}