TY  - RPRT
TI  - Hydrogen loss and its improved retention in hydrogen plasma treated a-SiNx:H films: ERDA study with 100 MeV Ag7+ ions
AU  - R. K. Bommali
AU  - S. Ghosh
AU  - S. A. Khan
AU  - P. Srivastava
PY  - 2017
DO  - 10.1016/j.nimb.2018.03.005
UR  - https://arxiv.org/abs/1707.03554
ID  - 1707.03554
ER  -