@misc{indiciae56ffb68f6607,
  title = {Intermodulation distortion of actuated MEMS capacitive switches},
  author = {Xi Luo and Yaqing Ning and David Molinero and Cristiano Palego and James CM Hwang and Charles L Goldsmith},
  year = {2017},
  doi = {10.1109/arftg.2013.6579053},
  url = {https://arxiv.org/abs/1707.05903},
  note = {Source identifier: 1707.05903}
}