TY  - RPRT
TI  - Intermodulation distortion of actuated MEMS capacitive switches
AU  - Xi Luo
AU  - Yaqing Ning
AU  - David Molinero
AU  - Cristiano Palego
AU  - James CM Hwang
AU  - Charles L Goldsmith
PY  - 2017
DO  - 10.1109/arftg.2013.6579053
UR  - https://arxiv.org/abs/1707.05903
ID  - 1707.05903
ER  -