@misc{indiciae138d9806c465,
  title = {Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion},
  author = {M. Hammerschmidt and M. Weiser and X. Garcia Santiago and L. Zschiedrich and B. Bodermann and S. Burger},
  year = {2017},
  doi = {10.1117/12.2270596},
  url = {https://arxiv.org/abs/1707.08467},
  note = {Source identifier: 1707.08467}
}