@misc{indiciae9709f77a5f32, title = {Dynamic Sensitivity Study of MEMS Capacitive Acceleration Transducer Based on Analytical Squeeze Film Damping and Mechanical Thermoelasticity Approaches}, author = {Liangrid Lutiani Silva and Janderson Rocha Rodrigues and Angelo Passaro and Vilson Rosa Almeida}, year = {2017}, url = {https://arxiv.org/abs/1708.01812}, note = {Source identifier: 1708.01812} }