TY  - RPRT
TI  - Dynamic Sensitivity Study of MEMS Capacitive Acceleration Transducer Based on Analytical Squeeze Film Damping and Mechanical Thermoelasticity Approaches
AU  - Liangrid Lutiani Silva
AU  - Janderson Rocha Rodrigues
AU  - Angelo Passaro
AU  - Vilson Rosa Almeida
PY  - 2017
UR  - https://arxiv.org/abs/1708.01812
ID  - 1708.01812
ER  -