@misc{indiciaea77551f92e24,
  title = {Superconducting Through-Silicon Vias for Quantum Integrated Circuits},
  author = {Mehrnoosh Vahidpour and William O'Brien and Jon Tyler Whyland and Joel Angeles and Jayss Marshall and Diego Scarabelli and Genya Crossman and Kamal Yadav and Yuvraj Mohan and Catvu Bui and Vijay Rawat and Russ Renzas and Nagesh Vodrahalli and Andrew Bestwick and Chad Rigetti},
  year = {2017},
  url = {https://arxiv.org/abs/1708.02226},
  note = {Source identifier: 1708.02226}
}