@misc{indiciae30ca4a486ba0,
  title = {All-optical lithography process for contacting atomically-precise devices},
  author = {Daniel R. Ward and Michael T. Marshall and DeAnna M. Campbell and Tzu-Ming Lu and Justin C. Koepke and David A. Scrymgeour and Ezra Bussmann and Shashank Misra},
  year = {2017},
  doi = {10.1063/1.4998639},
  url = {https://arxiv.org/abs/1708.05411},
  note = {Source identifier: 1708.05411}
}