TY  - RPRT
TI  - Channel resolution enhancement through scalability of nano/micro-scale thickness and width of SU-8 polymer based optical channels using UV lithography
AU  - Iraj S Amiri
AU  - Volker J. Sorger
AU  - M Ariannejad
AU  - M Ghasemi
AU  - P Yupapin
PY  - 2017
UR  - https://arxiv.org/abs/1708.06788
ID  - 1708.06788
ER  -