@misc{indiciae453e69404aa3,
  title = {In situ monitoring of atomic layer epitaxy via optical ellipsometry},
  author = {Fryderyk Lyzwa and Premysl Marsik and Vladimir Roddatis and Christian Bernhard and Markus Jungbauer and Vasily Moshnyaga},
  year = {2017},
  doi = {10.1088/1361-6463/aaac64},
  url = {https://arxiv.org/abs/1708.06979},
  note = {Source identifier: 1708.06979}
}