TY  - RPRT
TI  - In situ monitoring of atomic layer epitaxy via optical ellipsometry
AU  - Fryderyk Lyzwa
AU  - Premysl Marsik
AU  - Vladimir Roddatis
AU  - Christian Bernhard
AU  - Markus Jungbauer
AU  - Vasily Moshnyaga
PY  - 2017
DO  - 10.1088/1361-6463/aaac64
UR  - https://arxiv.org/abs/1708.06979
ID  - 1708.06979
ER  -