@misc{indiciae99b40a36c858,
  title = {On Scheduling a Photolithography Process Containing Cluster Tools},
  author = {Sreenath Chalil Madathil and Siddhartha Nambiar and Scott J. Mason and Mary E. Kurz},
  year = {2018},
  doi = {10.1016/j.cie.2018.05.036},
  url = {https://arxiv.org/abs/1708.09488},
  note = {Source identifier: 1708.09488}
}