TY - RPRT TI - Encapsulated silicon nitride nanobeam cavity for nanophotonics using layered materials AU - Taylor K. Fryett AU - Yueyang Chen AU - James Whitehead AU - Zane Matthew Peycke AU - Xiaodong Xu AU - Arka Majumdar PY - 2017 DO - 10.1021/acsphotonics.8b00036 UR - https://arxiv.org/abs/1709.02032 ID - 1709.02032 ER -